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Outgassing measurement of the aluminum alloy UHV chamber

机译:铝合金特高压室的放气测量

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摘要

A large vacuum chamber (580 mm diameter) was fabricated from an aluminum alloy surface treated by a special process normally used on small chambers. The chamber was tested unbaked and baked at various temperatures, pressures, and holding periods. The chamber was filled with N2 gas, and the outgassing rate was measured after one hour. Then the ultimate pressure was measured. Outgassing rates for baked and unbaked groups were compared. It is concluded that the same surface treatment technique can be used on both large and small chambers produced by the same special extrusion process.
机译:大型真空室(直径580毫米)由铝合金表面制成,该铝合金表面经过通常在小型室上使用的特殊工艺处理。在不同的温度,压力和保持时间下,对腔室进行未经烘烤和烘烤的测试。室中充满氮气,一小时后测量除气率。然后测量极限压力。比较了烘烤组和未烘烤组的脱气率。结论是,相同的表面处理技术可用于通过相同的特殊挤压工艺生产的大型和小型腔室。

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